MarSurf LD 130 Aspheric / LD 260 Aspheric

High-precision 2D/3D Measuring Station for Measurement and Evaluation of Optical Components

  • Measuring range up to 260 mm
  • High measuring speed
  • Checking topography during the first machining operations
  • Chip-coded bionic probe arms

Features – Properties of the horizontal axis (X)

  • Traversing length: 0.1 mm up to 130 mm / 260 mm
  • Positioning speed: 0.02 mm/s up to 200 mm/s
  • Measuring speed: 0.02 mm/s to 10 mm/s (for roughness measurement recommended: 0.1 mm/s to 0.5 mm/s)
  • Measuring point spacing: 0.05 µm up to 30 µm
  • Max. number of points in one scan: 2.6 Mio. points LD 130; 5.2 Mio. points LD 260
  • Resolution: 0.8 nm
  • Uncertainty X-axis display: ± (0.2+l/1000)μm; l in mm

Features – Technical data probe systems (measuring direction Z+ / Z-)

  • Probe measuring range: 13 mm (100 mm probe arm) ; 26 mm (200 mm probe arm)
  • Resolution: 0.8 nm
  • Measuring force: 0.5 mN up to 30 mN

Features – Option 3D Measuring station

  • Measuring time: 5 to 10 minuten, diameter up to 100 mm
  • C-axis: Measuring and positioning speed < 120°/s
  • C-axis: axial and radial run out< 100 nm, at 50 upr